Mesa Labs is the Expert at Low Flow Gas Measurements


Advances in microtechnology and other precision processes are driving industry to need high-accuracy measurement of very low flows. However, measuring very low flow rates (<5 sccm) is difficult for most technologies on the market. The measurements are often slow and can be difficult to obtain stability for laminar flow or thermal technologies. Additionally, the signal is so low that you will experience higher uncertainty when using a non-primary standard.

Mesa’s DryCal 800-3 combines our innovative dry, primary technology with intensive gravimetric calibration to create a flow standard that easily measures down to 0.5 sccm with an industry-leading 0.25% accuracy. Having a flow standard designed for ultra-low flow measurements means that measurements will be faster, and overall accuracy will be higher. Our comprehensive, multi-day calibration process guarantees that the gas flow for your most critical processes is accurate.

When gas flow rates are low, the total volume of gas in the system is low. This means that higher errors could be more catastrophic to the end product or process. Flow rates of a few sccm are common in critical processes in the medical and semiconductor industries. You want to be sure that you are trusting your critical processes to trusted standards. All our DryCal standards are NIST-traceable and ISO-17025 certified in our NVLAP-accredited laboratory.

Click here to learn more about the Science of DryCal.

Contact us today on how we can help streamline your low flow processes.


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